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Microstructure evolution in amorphous Ge/Si multilayers grown by magnetron sputter deposition

Jaerrendahl, K. / Ivanov, I. / Sundgren, J.-E. / Radnoczi, G. / Czigany, Z. / Greene, J. E.

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Microstructure evolution in amorphous Ge/Si multilayers grown by magnetron sputter deposition

Jaerrendahl, K. / Ivanov, I. / Sundgren, J.-E. / Radnoczi, G. / Czigany, Z. / Greene, J. E.

Microstructure evolution in amorphous Ge/Si multilayers grown by magnetron sputter deposition

Jaerrendahl, K. / Ivanov, I. / Sundgren, J.-E. / Radnoczi, G. / Czigany, Z. / Greene, J. E.

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Document information

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Document information

Title:

Microstructure evolution in amorphous Ge/Si multilayers grown by magnetron sputter deposition

Contributors:

Jaerrendahl, K. (author) / Ivanov, I. (author) / Sundgren, J.-E. (author) / Radnoczi, G. (author) / Czigany, Z. (author) / Greene, J. E. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 12 ; 1806-1815

Publication date:

1997-01-01

Size:

10 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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