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Amorphous molybdenum nitride thin films prepared by reactive sputter deposition

Wang, Y. / Lin, R. Y.

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Amorphous molybdenum nitride thin films prepared by reactive sputter deposition

Wang, Y. / Lin, R. Y.

Amorphous molybdenum nitride thin films prepared by reactive sputter deposition

Wang, Y. / Lin, R. Y.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Amorphous molybdenum nitride thin films prepared by reactive sputter deposition

Contributors:

Wang, Y. (author) / Lin, R. Y. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 112 ; 42-49

Publication date:

2004-01-01

Size:

8 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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Effect of deposition conditions on mechanical stresses and microstructure of sputter-deposited molybdenum and reactively sputter-deposited molybdenum nitride films

Shen, Y. G. | British Library Online Contents | 2003

A Multi-Technique Study of Titanium Nitride Films Deposited via Reactive Sputter Deposition

Walker, C. G. H. / Morton, S. A. / Charnock, J. M. et al. | British Library Online Contents | 2000

Sputter Deposition of Fe-Co Nitride for Ferromagnetic Granular Nitride Thin Film

Sakon, K. / Hirokawa, Y. / Masubuchi, Y. et al. | British Library Online Contents | 2010

Sputter deposition of nitride coatings in oxygen–contaminated sputter atmospheres

Jehn, Hermann A. / Fromm, Eckehard / Hofmann, Siegfried | British Library Online Contents | 1993