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Tensile testing of MEMS materials-recent progress

Sharpe, Jr., W. N. / Bagdahn, J. / Jackson, K. / Coles, G.

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Tensile testing of MEMS materials-recent progress

Sharpe, Jr., W. N. / Bagdahn, J. / Jackson, K. / Coles, G.

Tensile testing of MEMS materials-recent progress

Sharpe, Jr., W. N. / Bagdahn, J. / Jackson, K. / Coles, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Tensile testing of MEMS materials-recent progress

Contributors:

Sharpe, Jr., W. N. (author) / Bagdahn, J. (author) / Jackson, K. (author) / Coles, G. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 38 ; 4075-4079

Publication date:

2003-01-01

Size:

5 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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