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Micromechanical testing of MEMS materials

Buchheit, T. E. / Glass, S. J. / Sullivan, J. R. / Mani, S. S. / Lavan, D. A. / Friedmann, T. A. / Janek, R.

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Micromechanical testing of MEMS materials

Buchheit, T. E. / Glass, S. J. / Sullivan, J. R. / Mani, S. S. / Lavan, D. A. / Friedmann, T. A. / Janek, R.

Micromechanical testing of MEMS materials

Buchheit, T. E. / Glass, S. J. / Sullivan, J. R. / Mani, S. S. / Lavan, D. A. / Friedmann, T. A. / Janek, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

Similar titles

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Document information

Title:

Micromechanical testing of MEMS materials

Contributors:

Buchheit, T. E. (author) / Glass, S. J. (author) / Sullivan, J. R. (author) / Mani, S. S. (author) / Lavan, D. A. (author) / Friedmann, T. A. (author) / Janek, R. (author)

Published in:

JOURNAL OF MATERIALS SCIENCE ; 38 ; 4081-4086

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0022-2461

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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