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Micromechanical testing of SU-8 cantilevers

HOPCROFT, M. / KRAMER, T. / KIM, G. / TAKASHIMA, K. / HIGO, Y. / MOORE, D. / BRUGGER, J.

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Micromechanical testing of SU-8 cantilevers

HOPCROFT, M. / KRAMER, T. / KIM, G. / TAKASHIMA, K. / HIGO, Y. / MOORE, D. / BRUGGER, J.

Micromechanical testing of SU-8 cantilevers

HOPCROFT, M. / KRAMER, T. / KIM, G. / TAKASHIMA, K. / HIGO, Y. / MOORE, D. / BRUGGER, J.

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Title:

Micromechanical testing of SU-8 cantilevers

Contributors:

HOPCROFT, M. (author) / KRAMER, T. (author) / KIM, G. (author) / TAKASHIMA, K. (author) / HIGO, Y. (author) / MOORE, D. (author) / BRUGGER, J. (author)

Published in:

FATIGUE AND FRACTURE OF ENGINEERING MATERIALS AND STRUCTURES ; 28 ; 735-742

Publication date:

2005-01-01

Size:

8 pages

ISSN:

8756-758X

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1123

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