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Surface topography evolution and fatigue fracture of polysilicon
Surface topography evolution and fatigue fracture of polysilicon
Surface topography evolution and fatigue fracture of polysilicon
Allameh, S. M. (author) / Shrotriya, P. (author) / Butterwick, A. (author) / Brown, S. (author) / Yao, N. (author) / Soboyejo, W. (author)
JOURNAL OF MATERIALS SCIENCE ; 38 ; 4145-4155
2003-01-01
11 pages
Article (Journal)
English
DDC:
620.11
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