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On the evolution of surface morphology of polysilicon MEMS structures during fatigue
On the evolution of surface morphology of polysilicon MEMS structures during fatigue
On the evolution of surface morphology of polysilicon MEMS structures during fatigue
Shrotriya, P. (author) / Allameh, S. M. (author) / Soboyejo, W. O. (author)
MECHANICS OF MATERIALS ; 36 ; 35-44
2004-01-01
10 pages
Article (Journal)
English
DDC:
620.11
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