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Surface topography evolution and fatigue fracture of polysilicon
Surface topography evolution and fatigue fracture of polysilicon
Surface topography evolution and fatigue fracture of polysilicon
Allameh, S. M. (Autor:in) / Shrotriya, P. (Autor:in) / Butterwick, A. (Autor:in) / Brown, S. (Autor:in) / Yao, N. (Autor:in) / Soboyejo, W. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 38 ; 4145-4155
01.01.2003
11 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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