Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    The challenges of 157 nm nanolithography: surface morphology of silicon-based copolymers

    New search for: Sarantopoulou, E.
    New search for: Kollia, Z.
    New search for: Kocevar, K.
    New search for: Musevic, I.
    New search for: Kobe, S.
    New search for: Drazic, G.
    New search for: Gogolides, E.
    New search for: Argitis, P.
    New search for: Cefalas, A. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    The challenges of 157 nm nanolithography: surface morphology of silicon-based copolymers

    New search for: Sarantopoulou, E.
    New search for: Kollia, Z.
    New search for: Kocevar, K.
    New search for: Musevic, I.
    New search for: Kobe, S.
    New search for: Drazic, G.
    New search for: Gogolides, E.
    New search for: Argitis, P.
    New search for: Cefalas, A. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The challenges of 157 nm nanolithography: surface morphology of silicon-based copolymers

    New search for: Sarantopoulou, E.
    New search for: Kollia, Z.
    New search for: Kocevar, K.
    New search for: Musevic, I.
    New search for: Kobe, S.
    New search for: Drazic, G.
    New search for: Gogolides, E.
    New search for: Argitis, P.
    New search for: Cefalas, A. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    The challenges of 157 nm nanolithography: surface morphology of silicon-based copolymers

    Contributors:

    Sarantopoulou, E. (author) / Kollia, Z. (author) / Kocevar, K. (author) / Musevic, I. (author) / Kobe, S. (author) / Drazic, G. (author) / Gogolides, E. (author) / Argitis, P. (author) / Cefalas, A. C. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 23 ; 995-999

    Publication date:

    2003-01-01

    Size:

    5 pages

    ISSN:

    0928-4931

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 660

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Directed self-assembly of block copolymers for next generation nanolithography

    Jeong, S. J. / Kim, J. Y. / Kim, B. H. et al. | British Library Online Contents | 2013

    Nanolithography workbench

    British Library Online Contents | 2005

    Directly Writing Nanodots on Silicon Surface by Combined-Dynamic Dip-Pen Nanolithography

    Yang, L.J. / Cui, J.L. / Wang, Y. et al. | British Library Online Contents | 2014

    Nanolithography heats up

    Wood, J. | British Library Online Contents | 2004

    Dip-Pen Nanolithography of Chemical Templates on Silicon Oxide

    Kooi, S. E. / Baker, L. A. / Sheehan, P. E. et al. | British Library Online Contents | 2004

    Back to top