Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Interfacial Reaction-Controlled Deposition and Micropatterning of Oxide Thin Films for Gate Dielectrics

    New search for: Koumoto, K.
    New search for: Masuda, Y.
    New search for: Wang, D. J.
    New search for: Uematsu, K.
    New search for: Yokokawa, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Interfacial Reaction-Controlled Deposition and Micropatterning of Oxide Thin Films for Gate Dielectrics

    New search for: Koumoto, K.
    New search for: Masuda, Y.
    New search for: Wang, D. J.
    New search for: Uematsu, K.
    New search for: Yokokawa, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Interfacial Reaction-Controlled Deposition and Micropatterning of Oxide Thin Films for Gate Dielectrics

    New search for: Koumoto, K.
    New search for: Masuda, Y.
    New search for: Wang, D. J.
    New search for: Uematsu, K.
    New search for: Yokokawa, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Interfacial Reaction-Controlled Deposition and Micropatterning of Oxide Thin Films for Gate Dielectrics

    Contributors:

    Koumoto, K. (author) / Masuda, Y. (author) / Wang, D. J. (author) / Uematsu, K. / Yokokawa, H.

    Published in:

    Ceramic Interfaces: Properties and Applications V ; 139-150

    KEY ENGINEERING MATERIALS

    Publication date:

    2003-01-01

    Size:

    12 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Laser pulse induced micropatterning on sandwiched thin films

    Wei, J. / Liu, Q. / Xiao, M. | British Library Online Contents | 2013

    Laser pulse induced micropatterning on sandwiched thin films

    Wei, J. / Liu, Q. / Xiao, M. | British Library Online Contents | 2013

    Effects of the interfacial layer on electrical characteristics of Al2O3/TiO2/Al2O3 thin films for gate dielectrics

    Kim, C. E. / Yun, I. | British Library Online Contents | 2012

    Micropatterning by Non-Densely Packed Interfacial Colloidal Crystals

    Ray, M. A. / Jia, L. | British Library Online Contents | 2007

    Surface Energy Engineered, High-Resolution Micropatterning of Solution-Processed Reduced Graphene Oxide Thin Films

    Kim, N. H. / Kim, B. J. / Ko, Y. et al. | British Library Online Contents | 2013

    Back to top