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2D nano/micro hybrid patterning using soft/block copolymer lithography

Choi, D. G. / Yu, H. K. / Yang, S. M.

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2D nano/micro hybrid patterning using soft/block copolymer lithography

Choi, D. G. / Yu, H. K. / Yang, S. M.

2D nano/micro hybrid patterning using soft/block copolymer lithography

Choi, D. G. / Yu, H. K. / Yang, S. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

2D nano/micro hybrid patterning using soft/block copolymer lithography

Contributors:

Choi, D. G. (author) / Yu, H. K. (author) / Yang, S. M. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -AMSTERDAM THEN LAUSANNE- C ; 24 ; 213-216

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0928-4931

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.1 / 660

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