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Two-Dimensional Patterning of Flexible Designs with High Half-Pitch Resolution by Using Block Copolymer Lithography
Two-Dimensional Patterning of Flexible Designs with High Half-Pitch Resolution by Using Block Copolymer Lithography
Two-Dimensional Patterning of Flexible Designs with High Half-Pitch Resolution by Using Block Copolymer Lithography
Yamaguchi, T. (author) / Yamaguchi, H. (author)
ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 20 ; 1684-1689
2008-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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