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The influence of tip performance on scanning probe lithography

Zhou, H. / Li, Z. / Wu, A. / Zheng, J. / Zhang, J. / Wu, S.

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The influence of tip performance on scanning probe lithography

Zhou, H. / Li, Z. / Wu, A. / Zheng, J. / Zhang, J. / Wu, S.

The influence of tip performance on scanning probe lithography

Zhou, H. / Li, Z. / Wu, A. / Zheng, J. / Zhang, J. / Wu, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The influence of tip performance on scanning probe lithography

Contributors:

Zhou, H. (author) / Li, Z. (author) / Wu, A. (author) / Zheng, J. (author) / Zhang, J. (author) / Wu, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 221 ; 402-407

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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