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Copper chemical vapour deposition on organosilane-treated SiO2 surfaces

Semaltianos, N. G. / Pastol, J. L. / Doppelt, P.

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Copper chemical vapour deposition on organosilane-treated SiO2 surfaces

Semaltianos, N. G. / Pastol, J. L. / Doppelt, P.

Copper chemical vapour deposition on organosilane-treated SiO2 surfaces

Semaltianos, N. G. / Pastol, J. L. / Doppelt, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Copper chemical vapour deposition on organosilane-treated SiO2 surfaces

Contributors:

Semaltianos, N. G. (author) / Pastol, J. L. (author) / Doppelt, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 222 ; 102-109

Publication date:

2004-01-01

Size:

8 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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