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Atomic layer chemical vapour deposition of copper

Mane, A. U. / Shivashankar, S. A.

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Atomic layer chemical vapour deposition of copper

Mane, A. U. / Shivashankar, S. A.

Atomic layer chemical vapour deposition of copper

Mane, A. U. / Shivashankar, S. A.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Atomic layer chemical vapour deposition of copper

Contributors:

Mane, A. U. (author) / Shivashankar, S. A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 7 ; 343-347

Publication date:

2004-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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