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    Depth dependences of the ion bombardment induced roughness and of the interdiffusion coefficient for Si/Al multilayers

    New search for: Wang, J. Y.
    New search for: Zalar, A.
    New search for: Mittemeijer, E. J.

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    Depth dependences of the ion bombardment induced roughness and of the interdiffusion coefficient for Si/Al multilayers

    New search for: Wang, J. Y.
    New search for: Zalar, A.
    New search for: Mittemeijer, E. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Depth dependences of the ion bombardment induced roughness and of the interdiffusion coefficient for Si/Al multilayers

    New search for: Wang, J. Y.
    New search for: Zalar, A.
    New search for: Mittemeijer, E. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Depth dependences of the ion bombardment induced roughness and of the interdiffusion coefficient for Si/Al multilayers

    Contributors:

    Wang, J. Y. (author) / Zalar, A. (author) / Mittemeijer, E. J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 222 ; 171-179

    Publication date:

    2004-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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