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Deposition mechanism of sputtered amorphous carbon nitride thin film

Durand-Drouhin, O. / Benlahsen, M. / Clin, M. / Bouzerar, R.

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Deposition mechanism of sputtered amorphous carbon nitride thin film

Durand-Drouhin, O. / Benlahsen, M. / Clin, M. / Bouzerar, R.

Deposition mechanism of sputtered amorphous carbon nitride thin film

Durand-Drouhin, O. / Benlahsen, M. / Clin, M. / Bouzerar, R.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition mechanism of sputtered amorphous carbon nitride thin film

Contributors:

Durand-Drouhin, O. (author) / Benlahsen, M. (author) / Clin, M. (author) / Bouzerar, R. (author)

Published in:

APPLIED SURFACE SCIENCE ; 223 ; 269-274

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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