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Sputtered amorphous carbon nitride films

Kreider, K. G. / Tarlov, M. J. / Gillen, G. J. / Poirier, G. E. / Robins, L. H. / Ives, L. K. / Bowers, W. D. / Marinenko, R. B. / Smith, D. T.

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Sputtered amorphous carbon nitride films

Kreider, K. G. / Tarlov, M. J. / Gillen, G. J. / Poirier, G. E. / Robins, L. H. / Ives, L. K. / Bowers, W. D. / Marinenko, R. B. / Smith, D. T.

Sputtered amorphous carbon nitride films

Kreider, K. G. / Tarlov, M. J. / Gillen, G. J. / Poirier, G. E. / Robins, L. H. / Ives, L. K. / Bowers, W. D. / Marinenko, R. B. / Smith, D. T.

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Document information

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Document information

Title:

Sputtered amorphous carbon nitride films

Contributors:

Kreider, K. G. (author) / Tarlov, M. J. (author) / Gillen, G. J. (author) / Poirier, G. E. (author) / Robins, L. H. (author) / Ives, L. K. (author) / Bowers, W. D. (author) / Marinenko, R. B. (author) / Smith, D. T. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 10 ; 3079-3083

Publication date:

1995-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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