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    Growth mechanism of reactively sputtered aluminum nitride thin films

    New search for: Hwang, B. H.
    New search for: Chen, C. S.
    New search for: Lu, H. Y.
    New search for: Hsu, T. C.

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    Growth mechanism of reactively sputtered aluminum nitride thin films

    New search for: Hwang, B. H.
    New search for: Chen, C. S.
    New search for: Lu, H. Y.
    New search for: Hsu, T. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Growth mechanism of reactively sputtered aluminum nitride thin films

    New search for: Hwang, B. H.
    New search for: Chen, C. S.
    New search for: Lu, H. Y.
    New search for: Hsu, T. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Growth mechanism of reactively sputtered aluminum nitride thin films

    Contributors:

    Hwang, B. H. (author) / Chen, C. S. (author) / Lu, H. Y. (author) / Hsu, T. C. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING A -LAUSANNE- ; 325 ; 380 - 388

    Publication date:

    2002-01-01

    Size:

    9 pages

    ISSN:

    0921-5093

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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