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    Characteristics of unbalanced magnetron sputtering systems

    New search for: Golosov, D. A.
    New search for: Svadkovskii, I. V.
    New search for: Zavadskii, S. M.

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    Characteristics of unbalanced magnetron sputtering systems

    New search for: Golosov, D. A.
    New search for: Svadkovskii, I. V.
    New search for: Zavadskii, S. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characteristics of unbalanced magnetron sputtering systems

    New search for: Golosov, D. A.
    New search for: Svadkovskii, I. V.
    New search for: Zavadskii, S. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Characteristics of unbalanced magnetron sputtering systems

    Contributors:

    Golosov, D. A. (author) / Svadkovskii, I. V. (author) / Zavadskii, S. M. (author)

    Published in:

    SURFACE ENGINEERING AND APPLIED ELECTROCHEMISTRY C/C OF ELEKTRONNAIA OBRABOTKA MATERIALOV ; 56-64

    Publication date:

    2002-01-01

    Size:

    9 pages

    ISSN:

    1068-3755

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44 / 660.297

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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