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Roughening mechanisms of tensily strained Si1-x-yGexCy films grown by UHV-CVD: evidence of a carbon surface diffusion related mechanism
Roughening mechanisms of tensily strained Si1-x-yGexCy films grown by UHV-CVD: evidence of a carbon surface diffusion related mechanism
Roughening mechanisms of tensily strained Si1-x-yGexCy films grown by UHV-CVD: evidence of a carbon surface diffusion related mechanism
Calmes, C. (author) / Bouchier, D. (author) / Clerc, C. (author) / Zheng, Y. (author)
APPLIED SURFACE SCIENCE ; 224 ; 122-126
2004-01-01
5 pages
Article (Journal)
English
DDC:
621.35
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