Electrical properties of ZrO2 films on Si1-x-yGexCy epitaxial layers: Fid-Bau Portal

Electrical properties of ZrO2 films on Si1-x-yGexCy epitaxial layers

Chatterjee, S. / Dalapati, G. K. / Samanta, S. K. / Maiti, C. K.

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Electrical properties of ZrO2 films on Si1-x-yGexCy epitaxial layers

Chatterjee, S. / Dalapati, G. K. / Samanta, S. K. / Maiti, C. K.

Electrical properties of ZrO2 films on Si1-x-yGexCy epitaxial layers

Chatterjee, S. / Dalapati, G. K. / Samanta, S. K. / Maiti, C. K.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

Title:

Electrical properties of ZrO2 films on Si1-x-yGexCy epitaxial layers

Contributors:

Chatterjee, S. (author) / Dalapati, G. K. (author) / Samanta, S. K. (author) / Maiti, C. K. (author)

Published in:

APPLIED SURFACE SCIENCE ; 224 ; 288-291

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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