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    Etching characteristics of TiNi thin film by focused ion beam

    New search for: Xie, D. Z.
    New search for: Ngoi, B. K.
    New search for: Fu, Y. Q.
    New search for: Ong, A. S.
    New search for: Lim, B. H.

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    Etching characteristics of TiNi thin film by focused ion beam

    New search for: Xie, D. Z.
    New search for: Ngoi, B. K.
    New search for: Fu, Y. Q.
    New search for: Ong, A. S.
    New search for: Lim, B. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Etching characteristics of TiNi thin film by focused ion beam

    New search for: Xie, D. Z.
    New search for: Ngoi, B. K.
    New search for: Fu, Y. Q.
    New search for: Ong, A. S.
    New search for: Lim, B. H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Etching characteristics of TiNi thin film by focused ion beam

    Contributors:

    Xie, D. Z. (author) / Ngoi, B. K. (author) / Fu, Y. Q. (author) / Ong, A. S. (author) / Lim, B. H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 225 ; 54-58

    Publication date:

    2004-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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