Kinetics of {311} defect dissolution in silicon-on-insulator (SOI): Fid-Bau Portal

Kinetics of {311} defect dissolution in silicon-on-insulator (SOI)

Saavedra, A. F. / Jones, K. S. / Law, M. E. / Chan, K. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Kinetics of {311} defect dissolution in silicon-on-insulator (SOI)

Saavedra, A. F. / Jones, K. S. / Law, M. E. / Chan, K. K.

Kinetics of {311} defect dissolution in silicon-on-insulator (SOI)

Saavedra, A. F. / Jones, K. S. / Law, M. E. / Chan, K. K.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Kinetics of {311} defect dissolution in silicon-on-insulator (SOI)

Contributors:

Saavedra, A. F. (author) / Jones, K. S. (author) / Law, M. E. (author) / Chan, K. K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 107 ; 198-203

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Park, J.-G. / Jung, J.-K. / Cho, K.-C. et al. | British Library Online Contents | 1995

Kinetics of amorphous silicon dissolution into aluminum layers

Shetty, P. K. / Theodore, N. D. / Mayer, J. W. et al. | British Library Online Contents | 2006

Defect transformation study in silicon-on-insulator structures by high-resolution X-Ray diffraction

Popov, V. P. / Antonova, I. V. / Bak-Misiuk, J. et al. | British Library Online Contents | 2001

Fundamentals of Point Defect Aggregation and Dissolution Phenomena of Crystal Originated Defects in Czochralski Silicon

Wijaranakula, W. | British Library Online Contents | 1995

Silicon-on-Insulator Technology

Colinge, J.-P. / Bower, R. W. | British Library Online Contents | 1998