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Defect transformation study in silicon-on-insulator structures by high-resolution X-Ray diffraction

Popov, V. P. / Antonova, I. V. / Bak-Misiuk, J. / Domagala, J.

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Defect transformation study in silicon-on-insulator structures by high-resolution X-Ray diffraction

Popov, V. P. / Antonova, I. V. / Bak-Misiuk, J. / Domagala, J.

Defect transformation study in silicon-on-insulator structures by high-resolution X-Ray diffraction

Popov, V. P. / Antonova, I. V. / Bak-Misiuk, J. / Domagala, J.

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Check availability in my library

Order at Subito €

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Document information

Title:

Defect transformation study in silicon-on-insulator structures by high-resolution X-Ray diffraction

Contributors:

Popov, V. P. (author) / Antonova, I. V. (author) / Bak-Misiuk, J. (author) / Domagala, J. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 4 ; 35-37

Publication date:

2001-01-01

Size:

3 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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