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Silicalite-1/polymer films with low-k dielectric constants

Larlus, O. / Mintova, S. / Valtchev, V. / Jean, B. / Metzger, T. H. / Bein, T.

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Silicalite-1/polymer films with low-k dielectric constants

Larlus, O. / Mintova, S. / Valtchev, V. / Jean, B. / Metzger, T. H. / Bein, T.

Silicalite-1/polymer films with low-k dielectric constants

Larlus, O. / Mintova, S. / Valtchev, V. / Jean, B. / Metzger, T. H. / Bein, T.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Silicalite-1/polymer films with low-k dielectric constants

Contributors:

Larlus, O. (author) / Mintova, S. (author) / Valtchev, V. (author) / Jean, B. (author) / Metzger, T. H. (author) / Bein, T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 226 ; 155-160

Publication date:

2004-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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