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Characterization of diamond-like carbon (DLC) films deposited by a magnetron-sputter-type negative ion source (MSNIS)

Paik, N.

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Characterization of diamond-like carbon (DLC) films deposited by a magnetron-sputter-type negative ion source (MSNIS)

Paik, N.

Characterization of diamond-like carbon (DLC) films deposited by a magnetron-sputter-type negative ion source (MSNIS)

Paik, N.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characterization of diamond-like carbon (DLC) films deposited by a magnetron-sputter-type negative ion source (MSNIS)

Contributors:

Paik, N. (author)

Published in:

APPLIED SURFACE SCIENCE ; 226 ; 412-421

Publication date:

2004-01-01

Size:

10 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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