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Characteristics of HfO~2 Dielectric Layer Grown by MOMBE

Hong, J. H. / Myoung, J. M.

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Characteristics of HfO~2 Dielectric Layer Grown by MOMBE

Hong, J. H. / Myoung, J. M.

Characteristics of HfO~2 Dielectric Layer Grown by MOMBE

Hong, J. H. / Myoung, J. M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Characteristics of HfO~2 Dielectric Layer Grown by MOMBE

Contributors:

Hong, J. H. (author) / Myoung, J. M. (author) / Kang, S.-G. / Kobayashi, T.

Published in:

Designing, Processing and Properties of Advanced Engineering Materials PART 2 ; 1005-1008

MATERIALS SCIENCE FORUM ; 449/452

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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