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Characteristics of HfO~2 Dielectric Layer Grown by MOMBE
Characteristics of HfO~2 Dielectric Layer Grown by MOMBE
Characteristics of HfO~2 Dielectric Layer Grown by MOMBE
Hong, J. H. (Autor:in) / Myoung, J. M. (Autor:in) / Kang, S.-G. / Kobayashi, T.
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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