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Study of HfO2 thin films prepared by electron beam evaporation

Wang, Y. / Lin, Z. / Cheng, X. / Xiao, H. / Zhang, F. / Zou, S.

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Study of HfO2 thin films prepared by electron beam evaporation

Wang, Y. / Lin, Z. / Cheng, X. / Xiao, H. / Zhang, F. / Zou, S.

Study of HfO2 thin films prepared by electron beam evaporation

Wang, Y. / Lin, Z. / Cheng, X. / Xiao, H. / Zhang, F. / Zou, S.

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Check availability in my library

Order at Subito €

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Document information

Title:

Study of HfO2 thin films prepared by electron beam evaporation

Contributors:

Wang, Y. (author) / Lin, Z. (author) / Cheng, X. (author) / Xiao, H. (author) / Zhang, F. (author) / Zou, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 228 ; 93-99

Publication date:

2004-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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