Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248nm prepared by electron-beam evaporation: Fid-Bau Portal

Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248nm prepared by electron-beam evaporation

Yuan, J. / Yuan, L. / He, H. / Yi, K. / Fan, Z. / Shao, J.

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Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248nm prepared by electron-beam evaporation

Yuan, J. / Yuan, L. / He, H. / Yi, K. / Fan, Z. / Shao, J.

Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248nm prepared by electron-beam evaporation

Yuan, J. / Yuan, L. / He, H. / Yi, K. / Fan, Z. / Shao, J.

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Document information

Title:

Influence of ZrO2 in HfO2 on reflectance of HfO2/SiO2 multilayer at 248nm prepared by electron-beam evaporation

Contributors:

Yuan, J. (author) / Yuan, L. (author) / He, H. (author) / Yi, K. (author) / Fan, Z. (author) / Shao, J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 4864-4867

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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