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    Study of TiW/Au Thin Films Metallization Stack for High Temperature and Harsh Environment Devices on 6H Silicon Carbide

    New search for: Baeri, A.
    New search for: Raineri, V.
    New search for: Roccaforte, F.
    New search for: La Via, F.
    New search for: Zanetti, E.

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    Study of TiW/Au Thin Films Metallization Stack for High Temperature and Harsh Environment Devices on 6H Silicon Carbide

    New search for: Baeri, A.
    New search for: Raineri, V.
    New search for: Roccaforte, F.
    New search for: La Via, F.
    New search for: Zanetti, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study of TiW/Au Thin Films Metallization Stack for High Temperature and Harsh Environment Devices on 6H Silicon Carbide

    New search for: Baeri, A.
    New search for: Raineri, V.
    New search for: Roccaforte, F.
    New search for: La Via, F.
    New search for: Zanetti, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Study of TiW/Au Thin Films Metallization Stack for High Temperature and Harsh Environment Devices on 6H Silicon Carbide

    Contributors:

    Baeri, A. (author) / Raineri, V. (author) / Roccaforte, F. (author) / La Via, F. (author) / Zanetti, E. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 457/460 ; 873-876

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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