Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation: Fid-Bau Portal

Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation

Cheng, L. / Casady, J. R. B. / Mazzola, J. / Casady, J. B. / Koshka, Y. / Bondarenko, V.

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Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation

Cheng, L. / Casady, J. R. B. / Mazzola, J. / Casady, J. B. / Koshka, Y. / Bondarenko, V.

Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation

Cheng, L. / Casady, J. R. B. / Mazzola, J. / Casady, J. B. / Koshka, Y. / Bondarenko, V.

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Check availability in my library

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Document information

Title:

Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation

Contributors:

Cheng, L. (author) / Casady, J. R. B. (author) / Mazzola, J. (author) / Casady, J. B. (author) / Koshka, Y. (author) / Bondarenko, V. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 885-888

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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