High Dose High Temperature Ion Implantation of Ge into 4H-SiC

Kups, T. / Weih, P. / Voelskow, M. et al. | British Library Online Contents | 2006

Al and Al/C High Dose Implantation in 4H-SiC

Bluet, J. M. / Pernot, J. / Billon, T. et al. | British Library Online Contents | 2000

Consequences of High-Dose, High Temperature Al^+ Implantation in 6H-SiC

Stoemenos, J. / Pecz, B. / Heera, V. | British Library Online Contents | 2000

Effect of High-Dose Aluminium Implantation on 4H-SiC Oxidation

Cheng, L. / Casady, J. R. B. / Mazzola, J. et al. | British Library Online Contents | 2004

Defect levels in n-silicon after high energy and high dose implantation of proton

Barbot, J. F. / Blanchard, C. / Ntsoenzok, E. et al. | British Library Online Contents | 1996