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Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H-SiC

Panknin, D. / Wirth, H. / Mucklich, A. / Skorupa, W.

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Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H-SiC

Panknin, D. / Wirth, H. / Mucklich, A. / Skorupa, W.

Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H-SiC

Panknin, D. / Wirth, H. / Mucklich, A. / Skorupa, W.

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Order at Subito €

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Document information

Title:

Correlation of electrical and microstructural properties after high dose aluminium implantation into 6H-SiC

Contributors:

Panknin, D. (author) / Wirth, H. (author) / Mucklich, A. (author) / Skorupa, W. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 61-62 ; 363 - 367

Publication date:

1999-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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