Radical Nitridation of Ultra-Thin SiO~2/SiC Structure: Fid-Bau Portal

Radical Nitridation of Ultra-Thin SiO~2/SiC Structure

Yano, H. / Furumoto, Y. / Niwa, T. / Hatayama, T. / Uraoka, Y. / Fuyuki, T.

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Radical Nitridation of Ultra-Thin SiO~2/SiC Structure

Yano, H. / Furumoto, Y. / Niwa, T. / Hatayama, T. / Uraoka, Y. / Fuyuki, T.

Radical Nitridation of Ultra-Thin SiO~2/SiC Structure

Yano, H. / Furumoto, Y. / Niwa, T. / Hatayama, T. / Uraoka, Y. / Fuyuki, T.

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Check availability in my library

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Document information

Title:

Radical Nitridation of Ultra-Thin SiO~2/SiC Structure

Contributors:

Yano, H. (author) / Furumoto, Y. (author) / Niwa, T. (author) / Hatayama, T. (author) / Uraoka, Y. (author) / Fuyuki, T. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 1333-1336

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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