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Rapid thermal nitridation of thin chromium films

Russell, S. W. / Li, J. / Alford, T. L. / Oakey, P. R. / Shatas, S. C.

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Rapid thermal nitridation of thin chromium films

Russell, S. W. / Li, J. / Alford, T. L. / Oakey, P. R. / Shatas, S. C.

Rapid thermal nitridation of thin chromium films

Russell, S. W. / Li, J. / Alford, T. L. / Oakey, P. R. / Shatas, S. C.

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Document information

Title:

Rapid thermal nitridation of thin chromium films

Contributors:

Russell, S. W. (author) / Li, J. (author) / Alford, T. L. (author) / Oakey, P. R. (author) / Shatas, S. C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 90 ; 455-463

Publication date:

1995-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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