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    Diluted Nitric Oxide (NO) Annealing of SiO~2/4H-SiC in Cold-Wall Oxidation Furnace

    New search for: Kosugi, R.
    New search for: Fukuda, K.

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    Diluted Nitric Oxide (NO) Annealing of SiO~2/4H-SiC in Cold-Wall Oxidation Furnace

    New search for: Kosugi, R.
    New search for: Fukuda, K.

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    Check availability in my library
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    Diluted Nitric Oxide (NO) Annealing of SiO~2/4H-SiC in Cold-Wall Oxidation Furnace

    New search for: Kosugi, R.
    New search for: Fukuda, K.

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    Document information
    Title:

    Diluted Nitric Oxide (NO) Annealing of SiO~2/4H-SiC in Cold-Wall Oxidation Furnace

    Contributors:

    Kosugi, R. (author) / Fukuda, K. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 457/460 ; 1345-1348

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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