Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique: Fid-Bau Portal

Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique

Fu, X. A. / Dunning, J. / Zorman, C. A. / Mehregany, M.

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Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique

Fu, X. A. / Dunning, J. / Zorman, C. A. / Mehregany, M.

Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique

Fu, X. A. / Dunning, J. / Zorman, C. A. / Mehregany, M.

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Check availability in my library

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Document information

Title:

Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique

Contributors:

Fu, X. A. (author) / Dunning, J. (author) / Zorman, C. A. (author) / Mehregany, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 1519-1522

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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