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    Nanomechanical studies of MEMS structures

    New search for: Pustan, M.
    New search for: Ekwinski, G.
    New search for: Rymuza, Z.

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    Nanomechanical studies of MEMS structures

    New search for: Pustan, M.
    New search for: Ekwinski, G.
    New search for: Rymuza, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nanomechanical studies of MEMS structures

    New search for: Pustan, M.
    New search for: Ekwinski, G.
    New search for: Rymuza, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Nanomechanical studies of MEMS structures

    Contributors:

    Pustan, M. (author) / Ekwinski, G. (author) / Rymuza, Z. (author)

    Published in:

    INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 98 ; 384-388

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    1862-5282

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669.9

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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