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β-Ga2O3 epitaxial films deposited on epi-GaN/sapphire (0001) substrates by MOCVD
β-Ga2O3 epitaxial films deposited on epi-GaN/sapphire (0001) substrates by MOCVD
β-Ga2O3 epitaxial films deposited on epi-GaN/sapphire (0001) substrates by MOCVD
Cao, Qiong (author) / He, Linan (author) / Xiao, Hongdi (author) / Feng, Xianjin (author) / Lv, Yuanjie (author) / Ma, Jin (author)
Materials science in semiconductor processing ; 77 ; 58-63
2018-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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