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Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers
Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers
Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers
Ferro, G. (author) / Panknin, D. (author) / Stoemenos, J. (author) / Balloud, C. (author) / Camassel, J. (author) / Polychroniadis, E. (author) / Monteil, Y. (author) / Skorupa, W. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 313-316
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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