Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX: Fid-Bau Portal

Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX

Hong, M.-H. / Chung, J. / Namavar, F. / Pirouz, P.

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Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX

Hong, M.-H. / Chung, J. / Namavar, F. / Pirouz, P.

Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX

Hong, M.-H. / Chung, J. / Namavar, F. / Pirouz, P.

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Check availability in my library

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Document information

Title:

Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX

Contributors:

Hong, M.-H. (author) / Chung, J. (author) / Namavar, F. (author) / Pirouz, P. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 525-528

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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