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    Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH~3SiH~3

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    New search for: Ohtani, R.
    New search for: Motooka, T.

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    Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH~3SiH~3

    New search for: Ikoma, Y.
    New search for: Ohtani, R.
    New search for: Motooka, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH~3SiH~3

    New search for: Ikoma, Y.
    New search for: Ohtani, R.
    New search for: Motooka, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH~3SiH~3

    Contributors:

    Ikoma, Y. (author) / Ohtani, R. (author) / Motooka, T. (author)

    Published in:

    MATERIALS SCIENCE FORUM ; 457/460 ; 325-328

    Publication date:

    2004-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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