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Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH~3SiH~3
Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH~3SiH~3
Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH~3SiH~3
Ikoma, Y. (Autor:in) / Ohtani, R. (Autor:in) / Motooka, T. (Autor:in)
MATERIALS SCIENCE FORUM ; 457/460 ; 325-328
01.01.2004
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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