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Electrical Characterization of Semi-Insulating 6H-SiC Substrates

Sanchez, E. / Wan, J. / Wang, S. / Loboda, M. / Li, C. / Skowronski, M.

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Electrical Characterization of Semi-Insulating 6H-SiC Substrates

Sanchez, E. / Wan, J. / Wang, S. / Loboda, M. / Li, C. / Skowronski, M.

Electrical Characterization of Semi-Insulating 6H-SiC Substrates

Sanchez, E. / Wan, J. / Wang, S. / Loboda, M. / Li, C. / Skowronski, M.

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Check availability in my library

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Document information

Title:

Electrical Characterization of Semi-Insulating 6H-SiC Substrates

Contributors:

Sanchez, E. (author) / Wan, J. (author) / Wang, S. (author) / Loboda, M. (author) / Li, C. (author) / Skowronski, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 669-672

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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