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HTCVD Grown Semi-Insulating SiC Substrates

Ellison, A. / Magnusson, B. / Son, N. T. / Storasta, L. / Janzen, E.

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HTCVD Grown Semi-Insulating SiC Substrates

Ellison, A. / Magnusson, B. / Son, N. T. / Storasta, L. / Janzen, E.

HTCVD Grown Semi-Insulating SiC Substrates

Ellison, A. / Magnusson, B. / Son, N. T. / Storasta, L. / Janzen, E.

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Check availability in my library

Order at Subito €

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Document information

Title:

HTCVD Grown Semi-Insulating SiC Substrates

Contributors:

Ellison, A. (author) / Magnusson, B. (author) / Son, N. T. (author) / Storasta, L. (author) / Janzen, E. (author) / Bergman, P. / Janzen, E.

Published in:

Silicon Carbide and Related Materials 2002 ; 33-38

MATERIALS SCIENCE FORUM ; 433/436

Publication date:

2003-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Storasta, L. / Aleksiejunas, R. / Sudzius, M. et al. | British Library Online Contents | 2005

Observation of Vacancy Clusters in HTCVD Grown SiC

Aavikko, R. / Saarinen, K. / Magnusson, B. et al. | British Library Online Contents | 2005

SiC Crystal Growth by HTCVD

Ellison, A. / Magnusson, B. / Sundqvist, B. et al. | British Library Online Contents | 2004

Growth of High Quality p-Type 4H-SiC Substrates by HTCVD

Sundqvist, B. / Ellison, A. / Jonsson, A. et al. | British Library Online Contents | 2003

SiC HTCVD Simulation Modified by Sublimation Etching

Kitou, Y. / Makino, E. / Ikeda, K. et al. | British Library Online Contents | 2006