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Non-Contact Doping Profiling in Epitaxial SiC

Savtchouk, A. / Oborina, E. / Hoff, A. M. / Lagowski, J.

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Non-Contact Doping Profiling in Epitaxial SiC

Savtchouk, A. / Oborina, E. / Hoff, A. M. / Lagowski, J.

Non-Contact Doping Profiling in Epitaxial SiC

Savtchouk, A. / Oborina, E. / Hoff, A. M. / Lagowski, J.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Non-Contact Doping Profiling in Epitaxial SiC

Contributors:

Savtchouk, A. (author) / Oborina, E. (author) / Hoff, A. M. (author) / Lagowski, J. (author)

Published in:

MATERIALS SCIENCE FORUM ; 457/460 ; 755-758

Publication date:

2004-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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