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The formation of inorganic oxide insulators for use in ULSIs formed from organic sources
The formation of inorganic oxide insulators for use in ULSIs formed from organic sources
The formation of inorganic oxide insulators for use in ULSIs formed from organic sources
Kobayashi, K. (author)
MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 111 ; 20-24
2004-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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