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A TiNiPd thin film microvalve for high temperature applications

Liu, Y. / Kohl, M. / Okutsu, K. / Miyazaki, S.

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A TiNiPd thin film microvalve for high temperature applications

Liu, Y. / Kohl, M. / Okutsu, K. / Miyazaki, S.

A TiNiPd thin film microvalve for high temperature applications

Liu, Y. / Kohl, M. / Okutsu, K. / Miyazaki, S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A TiNiPd thin film microvalve for high temperature applications

Contributors:

Liu, Y. (author) / Kohl, M. (author) / Okutsu, K. (author) / Miyazaki, S. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING A ; 378 ; 205-209

Publication date:

2004-01-01

Size:

5 pages

ISSN:

0921-5093

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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